[内容简介]The measurement and identification of surface topography are more and more important to many modern production methods. This book introduces a series of international standard rules and regulations of this industry. At present there are many new optical technology used for measuring surface topography, while some are under study. Each method has its advantage and limitation. This book introduces various optical equipments from the very beginning, analyzing their common features and limitations.

[目次]1 Introduction to Surface Texture Measurement
2 Some Common Terms and Definitio
3 Limitatio of Optical 3D Seo
4 Calibration of Optical Surface Topography Measuring Itruments
5 Chromatic Confocal Microscopy
6 Point Autofocus Itruments
7 Focus Variation Itruments
8 Phase Shifting Interferometry
9 Coherence Scanning Interferometry
10 Digital Holographic Microscopy
11 Imaging Confocal Microscopy
12 Light Scattering Methods
Index