[内容简介]:
Laser materials interaction and processing is an established and growing field within the materials science community. By taking a detailed look at the fundamentals of laser matter interaction, this book charts the recent progress of laser materials interaction and processing in various emerging materials science domains.
With special emphasis placed on nanostructures and future developments, this book provides an interdisciplinary support for basic and applied photo-assisted processing research.
Table Of Contents
Introduction to the Laser Processing of Materials
J. Perri?e, E. Millon and E. Fogarassy
Chapter 1. Laser Ablation-Based Synthesis of Nanomaterials
A.V. Kabashin and M. Meunier
1.1. Introduction
1.2. General Aspects of Laser Ablation and Nanocluster Formation
1.2.1. Nucleation
1.2.2. Kinetics-Controlled Growth
1.2.3. Diffusion-Controlled Growth
1.2.4. Transition Phase
1.2.5. Ostwald Ripening
1.3. Synthesis of Nanomaterials in Gaseous Environment
1.3.1. Configuration of Conventional Pulsed-Laser Deposition for Production of Nanomaterials
1.3.2. Studies of Laser Ablation-Based Nanocluster Growth in a Residual Buffer Gas
1.3.3. Properties of Nanostructured Si-Based Films Prepared by Pulsed-Laser Deposition
1.3.4. Use of Other Laser Ablation-Based Methods for Producing Nanostructures
1.4. Synthesis of Nanomaterials in Liquid Environment: Production of Colloidal Nanoparticles
1.4.1. Physical Aspects of Laser Ablation in Liquid Environment
1.4.2. Fabrication of Ultrapure Colloids in Chemical Solutions
1.5. Conclusions
Chapter 2. Metal?ielectric Nanocomposites Produced by Pulsed Laser Deposition: A Route for New Functional Materials
C.N. Afonso, J. Gonzalo, R. Serna and J. Solis
2.1. Introduction
2.2. Production of Metal?ielectric Nanocomposites
2.2.1. Features, Advantages and Limitations of Pulsed Laser Deposition
2.2.2. Control of the Deposition Sequence: Alternate PLD
2.2.3. The Role of PLD Parameters on Morphological and Structural Properties of Nanocomposite Films
2.3. Properties and Applications of Metal?ielectric Nanocomposites
2.3.1. Optical Properties
2.3.2. Magnetic Properties
2.3.3. Thermal Properties
2.4. Summary and Future Trends
Chapter 3. Carbon-Based Materials by Pulsed Laser Deposition: From Thin Films to Nanostructures
T. Sz??yi
3.1. Introduction
3.2. The Peculiarities of Pulsed Laser Deposition
3.3. Pulsed Laser Deposition of Pure Carbon Forms
3.3.1. PLD of DLC in Vacuum
3.3.2. Ablation in Inert Gas Atmospheres: He, Ar, Xe
3.3.3. Ablation in Hydrogen and Oxygen Ambient
3.3.4. Production of Nanotubes
3.4. Pulsed Laser Deposition of Carbon Compounds ?A Case Study of Carbon Nitride
Chapter 4. Fabrication of Micro-optics in Polymers and in UV Transparent Materials
G. Kopitkovas, L. Urech and T. Lippert
4.1. Introduction
4.2. Laser Ablation of Polymers
4.2.1. Mechanisms and Models
4.2.2. Commercially Available and Designed Polymers
4.3. Methods for the Fabrication of Micro-optical Elements in Polymers
4.3.1. Laser Beam Writing
4.3.2. Fabrication of Micro-optics using Laser Ablation and Half Tone or Diffractive Gray Tone Masks
4.4. Microstructuring of UV Transparent Materials
4.4.1. Fabrication and Applications of Micro-optical Elements in Quartz
4.5. Conclusions
Chapter 5. Ultraviolet Laser Ablation of Polymers and the Role of Liquid Formation and Expulsion
S. Lazare and V. Tokarev
5.1. Introduction
5.2. Polymers and Lasers: The Situation in 2005
5.3. From Ablation Curve to Ablation Recoil Pressure
5.4. Experimental
5.4.1. General Setup Designed for Laser Microdrilling
5.4.2. Precision Lens Projection Setup for Submicron Ablation
5.5. Microdrilling
5.5.1. Rate of Drilling and Stationary Profile with PET Example
5.5.2. Other Polymers
5.5.3. Search for the Optimum Aspect Ratio
5.5.4. Model
5.5.5. Mechanisms and Perspectives
5.5.6. Microdrilling Summary
5.6. Submicron Resolution
5.6.1. Two Beams Imaging Experiments by Filtering
5.6.2. Defocus Adjustment Experiments (3 Beams)
5.6.3. Discussion and Perspectives of Submicron Experiments
5.7. Viscous Microflow on Polymers Induced by Ablation
5.8. Phase Explosion and Formation of Nanofibers on PMMA
5.8.1. Possible Mechanisms
5.9. Comparison with Ablation of Metals (Titanium)
5.10. Conclusions and Perspectives
Chapter 6. Nanoscale Laser Processing and Micromachining of Biomaterials and Biological Components
D.B. Chrisey, S. Qadri, R. Modi, D.M. Bubb, A. Doraiswamy, T. Patz and R. Narayan
6.1. Introduction
6.1.1. Nanotechnology in Biology and Medicine
6.1.2. Laser Material Interactions for Biological Materials
6.2. Nanoscale Laser Processing and Micromachining of Biomaterials and Biological Components
6.2.1. Matrix Assisted Pulsed Laser Deposition of Novel Drug Delivery Coatings
6.2.2. Resonant Infrared Pulsed Laser Deposition of Drug Delivery Coatings
6.2.3. Resonant Infrared Matrix Assisted Pulsed Laser Evaporation
6.2.4. Laser Micromachining of Differentially Adherent Substrate for Three-Dimensional Myoid Fabrication
6.2.5. Matrix Assisted Pulsed Laser Evaporation Direct Write Applied to the Fabrication of Three-Dimensional Tissue Constructs
6.3. Conclusions
Chapter 7. Direct Transfer and Microprinting of Functional Materials by Laser-Induced Forward Transfer
K.D. Kyrkis, A.A. Andreadaki, D.G. Papazoglou and I. Zergioti
7.1. Introduction to the Laser-Induced Transfer Methods
7.1.1. Overview of the Laser-Induced Forward Transfer Process
7.1.2. Laser Transfer Methods
7.2. Laser Microprinting for Electronics and Optoelectronics
7.2.1 Conventional Pattern Transfer Processes
7.2.2. Laser Printing for Electronics and Power Devices
7.2.3. Laser Printing for Organic Optoelectronics
7.3. Laser Printing of Biomaterials
7.4. Physics of the LIFT Method ?Time-Resolved Imaging Diagnostics
7.5. Summary and Future Aspects
Chapter 8. Recent Progress in Direct Write 2D and 3D Photofabrication Techniques with Femtosecond Laser Pulses
J. Koch, T. Bauer, C. Reinhardt and B.N. Chichkov
8.1. Laser Photofabrication Technique/Introduction
8.1.1. Ablative Micro- and Nanostructuring with Femtosecond Laser Pulses
8.1.2. Two-Photon Polymerization (2PP) Technique
8.1.3. Multiphoton Activated Processing (MAP)
8.2. High-Resolution 2D Photofabrication Technique with Femtosecond Laser Pulses
8.3. Nanotexturing of Metals by Laser-Induced Melt Dynamics
8.4. Deep Drilling and Cutting with Ultrashort Laser Pulses
8.5. 3D Photofabrication and Microstructuring
8.6. Application Examples
8.6.1. Plasmonics
8.6.2. Microfluidics
8.7. Summary and Outlook
Chapter 9. Self-Organized Surface Nanostructuring by Femtosecond Laser Processing
J. Reif, F. Costache and M. Bestehorn
9.1. Introduction
9.2. Classical Picture of Laser Induced Periodic Surface Structure (LIPSS) Formation
9.3. Typical Laser induced Surface Nanostruclures
9.4. Dynamics of Femtosecond Laser Ablation from Dielectrics and Semiconductors: Generation of Surface Instabilities
9.5. Self-Organized Pattern Formation from Instabilities: Femtosecond Laser Ablation and Ion Beam Erosion
9.6. Summary and Outlook
Chapter 10. Three-Dimensional Micromachining with Femtosecond Laser Pulses
W. Watanabe and K. Itoh
10.1. Introduction
10.2. Femtosecond Laser-Induced Refractive-Index Change
10.2.1. Induction of Refractive-Index Change
10.2.2. Fabrication of Waveguides
10.3. Refractive-Index Change by Filamentation
10.3.1. Filamentation
10.3.2. Induction of Refractive-Index Change
10.3.3. Waveguide and Coupler
10.3.4. Grating
10.3.5. Diffractive Lens
10.4. Void
10.4.1. Formation of Void
10.4.2. Binary Data Storage
10.4.3. Fresnel Zone Plate
10.5. Two-Beam Interference
10.5.1. Holographic Grating
10.5.2. Holographic Memory
10.6. Microchannel
10.7. Summary
Chapter 11. Laser Crystallization of Silicon Thin Films for Flat Panel Display Applications
A.T. Voutsas
11.1. Introduction
11.2. The Evolution in Poly-Si Crystallization Technology
11.2.1. Solid-Phase Crystallization (SPC)
11.2.2. Laser Crystallization Technology
11.3. Si Transformation by Laser Crystallization (LC)
11.3.1. Conventional LC
11.3.2. Advanced Lateral Growth (LC) Technology
11.3.3. Laterally Grown Poly-Si Microstructure
11.4. Characteristics of Advanced Poly-Si TFTs
11.4.1. Material-Quality to Device-Performance Correlation
11.4.2. Performance Predictions for Advanced Poly-Si TFTs
11.5. Remaining Challenges in Si Crystallization
Chapter 12. Long Pulse Excimer Laser Doping of Silicon and Silicon Carbide for High Precision Junction Fabrication
E. Fogarassy and J. Venturini
12.1. Introduction
12.2. Laser Doping of Silicon
12.2.1. Introduction: CMOS Technology
12.2.2. Thermal Simulations
12.2.3. Laser Annealing of Implanted Silicon (Liquid and Solid Phase)
12.2.4. Laser Induced Diffusion from Spin-On Glass
12.3. Laser Doping of Silicon Carbide
12.3.1. Introduction
12.3.2. Simulations
12.3.3. Experimental Conditions
12.3.4. Results
12.3.5. Conclusion
12.4. General Conclusion
Chapter 13. Laser Cleaning: State of the Art
Ph. Delaporte and R. Oltra
13.1. Introduction to Laser Cleaning
13.1.1. Cleaning Processes
13.1.2. The Basic Laser Material Interaction of the Laser Cleaning Process
13.2. Mechanisms and Performances
13.2.1. Laser Removal of Particles
13.2.2. Laser Removal of Superficial Layers
13.3. Laser Cleaning Applications
13.3.1. Typical Laser Cleaning Setup
13.3.2. Microelectronic Industry
13.3.3. Nuclear Industry
13.3.4. Art Cleaning
13.4. Integration of Laser Cleaning in a Transformation Process
13.4.1. Surface Pre-treatment: PROTAL?Process
13.4.2. Surface Preparation for Adhesion
13.5. Summary and Outlook
Index