【内容简介】
Precision Motion Control focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system
The second edition has been edited and rewritten throughout with the following particular areas being expanded or added: - piezoelectric actuators; - fine movement control; - gantry-stage control; - interpolation of quadrature encoder signals; - geometrical error modelling for single-, dual- and general-XY-axis stages
By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter, accessible to a broad base of readers, ranging from academics to practitioners, is provided.
【目次】
Introduction.
- Precision Tracking Motion Control.
- Automatic Tuning of Control Parameters.
- Co-ordinated Motion Control of Gantry Systems.
- Geometrical Error Compensation.
- Electronic Interpolation Errors.
- Vibration Monitoring and Control.
- Other Engineering Aspects.
- Appendix: Laser Calibration Optics, Accessories and Set-up.