【内容简介】
The rapidly emerging fields of nanotechnology and nano-fabrication have enabled the creation of new sensors with dramatic improvements in sensitivity and range, along with substantial miniaturization. And, although there are many books on nanotechnology, recent advances in micro and nano-scale sensors and transducers are not adequately represented in most books. This book fills that gap.
Micro- and Nano-Scale Sensors and Transducers provides a summary of the state of the art in sensor and transducer technology. Teaching you how to make more informed selections of sensors or transducers for particular applications, it describes the differences between new sensor and transducer technologies based on nanotechnology and nano-fabrication and the older or "classical" sensor technologies.
The book presents the new structures of pressure sensors being used in such applications as mechanical pressure sensing, gas pressure sensing, and atmospheric pressure sensing. It illustrates the novel structures and characteristics of new motion and acceleration sensors.
Describing highly sensitive miniature gas and smoke sensors based on nano-structured electrodes, the book presents novel techniques for detecting atmospheric moisture and moisture inside small electronic components. It also covers applications of optoelectronic and photonic sensors.
The book examines multi-purpose biological and chemical analysis devices where each device is fully contained in one integrated circuit (Lab on a Chip) as well as other advanced chemical and biological sensors. It describes electric, magnetic, and RF / microwave sensors and their applications and also considers integrated sensor / actuator units and special-purpose sensors.
Each chapter in the book includes a set of quizzes / short questions, along with answers.
【目录】
Pressure Sensors
Capacitive Pressure Sensors
Structure
Theory
Experimental results
Inductive Pressure Sensors
Structure
Theory
Experimental results
Sensor interface circuit
Ultrahigh-Sensitivity Pressure Sensors
Structure
Theory
Experimental Results
Conclusion
Quiz
References
Motion and Acceleration Sensors
Ultrahigh-Sensitivity,Wide Dynamic Range Sensors
Structure
Theory
Experimental Results
Conclusion
Other Motion and Acceleration Micro Sensors
Quiz
References
Gas and Smoke Sensors
A CO Gas Sensor based on Nanotechnology
Structure
Theory
Assembly of the Sensor
Experimental Results
Auxiliary Experimental Results
Conclusion
Smoke Detectors
Structure
Qualitative Description of the Detector
Theory
Experimental Results
Conclusion
Quiz
References
Moisture Sensors
Structure
Theory
Main Experimental Results
Auxiliary Experimental Results
Conclusion
Quiz
References
Optoelectronic and Photonic Sensors
Optoelectronic Microphone
Introduction and Principle of Operation
Theory
Description of the Image Acquisition / Pattern Recognition Hardware and Software
Experimental Results
Conclusion
Other Optoelectronic and Photonic Micro Sensors
Quiz
References
Biological, Chemical, and "Lab on a Chip" Sensors
"Lab on a Chip" Sensors
Other Bio-Chemical Micro and Nano Sensors
Quiz
References
Electric, Magnetic, and RF / Microwave Sensors
Magnetic Field Sensors
Introduction and Principle of Operation
Theory
Manufacturing and Assembly of the Prototype Sensor
Numerical Data and Experimental Results
Conclusion
Other Important Electromagnetic / RF Micro and Nano Sensors
Quiz
References
Integrated Sensor / Actuator Units and Special Purpose Sensors
Aircraft Icing Detectors
Introduction and Principle of Operation
Theory
Performance Data and Experimental Results
Conclusion
Microfluidic, Micro-Actuators, and Other Special Purpose Small-Scale Devices
Quiz
References